JPH0481964U - - Google Patents

Info

Publication number
JPH0481964U
JPH0481964U JP12388190U JP12388190U JPH0481964U JP H0481964 U JPH0481964 U JP H0481964U JP 12388190 U JP12388190 U JP 12388190U JP 12388190 U JP12388190 U JP 12388190U JP H0481964 U JPH0481964 U JP H0481964U
Authority
JP
Japan
Prior art keywords
plate
seal bar
movable seal
approach
width direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12388190U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12388190U priority Critical patent/JPH0481964U/ja
Publication of JPH0481964U publication Critical patent/JPH0481964U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Furnace Details (AREA)
JP12388190U 1990-11-26 1990-11-26 Pending JPH0481964U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12388190U JPH0481964U (en]) 1990-11-26 1990-11-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12388190U JPH0481964U (en]) 1990-11-26 1990-11-26

Publications (1)

Publication Number Publication Date
JPH0481964U true JPH0481964U (en]) 1992-07-16

Family

ID=31871563

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12388190U Pending JPH0481964U (en]) 1990-11-26 1990-11-26

Country Status (1)

Country Link
JP (1) JPH0481964U (en])

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